This equipment is mainly used for single-sided high-precision grinding and polishing of thin precision parts such as sapphire substrates, sapphire epitaxial wafers, silicon wafers, ceramics, quartz crystals, and other semiconductor materials.
Características:
1. This equipment is a single-sided precision grinding equipment, which adopts advanced mechanical structure and control method, with high grinding efficiency and stable operation.
2. The whole machine adopts PLC+touch screen control system, which is simple and convenient to set equipment parameters and operate, and has high system stability.
3. The main motor adopts variable frequency speed control to realize soft start and soft shutdown of the main machine, reduce the impact of equipment operation, and reduce workpiece damage.
4. The workpiece grinding pressure adopts cylinder pressurization, and the closed-loop control of pressure is realized through electrical proportional valve control to ensure extremely high pressure accuracy and stability.
5. The upper pressure plate adopts active drive mode to ensure the uniformity of grinding processing at each station under the premise of ensuring the product grinding rate.
6. Both the grinding plate and the upper pressure plate are equipped with cooling water cooling function, which can reduce the deformation of the grinding plate surface while ensuring the maximum efficiency of the grinding fluid.
7. The equipment comes with a disc finishing machine, which can ensure the disc surface flatness of 0.01mm after disc finishing.
Especificaciones:
Model | HN-610 | HN-700 | HN-910 |
Grinding disc spec. | Ø610*160*12.7mm | Ø700*160*12.7mm | Ø910mm |
Workpiece disc dia. | Ø200mm | Ø305mm | Ø360mm |
Workpiece disc pressure | 30~120kg | 30~150kg | 30~150kg |
Pressure method | Cylinder pressurization | Cylinder pressurization | Cylinder pressurization |
Working air pressure | 0.4-0.6MPa | 0.4-0.6MPa | 0.4-0.6MPa |
Workpiece disc speed | 5·60rpm(max) | 5·60rpm(max) | 5·60rpm(max) |
Polishing disc speed | 0-100rpm | 0-100rpm | 100rpm(max) |
Main motor power | 4KW/380V | 4KW/380V | 7.5KW/380V |
Pressure plate motor power | 0.4KW/380Vx4 | 0.4KW/380Vx4 | 0.4KW/380Vx4 |
No. of machine stations | 4 pcs | 4 pcs | 4 pcs |
Dimension | 1200x750x2050mm | 1200x1700x2300mm | 1650x1150x2200mm |
Weight | 1050KG | 2000KG | 2300KG |
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