Wafer bonding refers to the technology of connecting wafers and other devices into a new wafer by a physical method. It is a very important technology in modern semiconductor manufacturing technology, widely used in MEMS devices, solar cells, LED wafers and other fields.
Features:
Advantages:
Specifications:
Chamber size | ≤12 inch |
Temp. range | ≤300℃ |
Recycling time | 0-60min |
Voltage | 220V |
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